A clean room pollution control technology program
    The main task is to clean up the air, according to various production processes, different processes, all kinds of air cleanliness level required of the room, taking technical measures to reduce air filter particulate contaminants or chemical molecules in the clean room air suspension to lower the allowable concentration . 3 production, building envelope, facilities; 1, atmospheric dust, bacteria, purify the air conditioning system into the fresh air of dust and microorganisms; 2, workers dust: clean indoor pollution mainly from four areas dust here, including walls, ceilings, floors, and some bare dust production line; 4, equipment and production process of dust production.
    To ensure the cleanliness of the air or other environmental product uses cleanroom required to take various measures to achieve the comprehensive technical requirements. These comprehensive measures include: pollutants should be less production technology and equipment, or to take the necessary measures to prevent isolation and negative pressure generated in the production process contaminants spread to the surrounding, less dust production use, easy to breed microbes like interior decoration materials and industrial equipment; reduction of personnel and materials into the indoor pollutants; maintain production environment with respect to outdoor air cleanliness level requirements or lower the next room there is a certain pressure to prevent the next room or outdoor airborne pollutants by over doors and windows other cracks, holes invasion; to strengthen the management of the clean room, according to the provisions for cleaning, sterilization and the like.
    In addition to taking all these technical measures, to make a production environment or for other purposes indoor environmental control in clean room air cleanliness level required by the important technical measures are needed into a sufficient amount of treated clean air to replace or indoor air pollution was diluted in normal operation generated pollutants. Clean room air purification treatment is different depending on the room cleanliness level requirements, take a different approach into after varying amounts of clean air treatment, while the corresponding number of drain away carrying pollutants generated by indoor air contamination dirty , by such a dynamic equilibrium, so that the indoor environment is maintained at the desired level of air cleanliness.
    Currently the clean room of clean air into the method, the most important and most widely used way is to air filtration. Clean air into the clean room, primarily to set different performance air filters by all parts of the air supply system for removing airborne particulates and microorganisms.
    The following will cleanroom contamination control in the relatively new field of technical solutions are introduced:
   (1) by conventional air spray chamber wet processing to handle the new wind chemicals. Japan in recent years carried out a lot of research to prove its effectiveness. Japan's three industrial companies use the machine for pure water and tap water gas treatment were compared, that the water purification rate higher than that of pure water, which is due to the influence of ions in water and the like.
   (2) has bactericidal action of HEPA filter (sterilizing enzyme filter din). In the past the use of toxic metal ions to sterilization, such as silver exchange fibers is higher than the male type air filter (IEE-Ag), today can be extracted from the organism natural enzymes (fixed fiber paper to achieve molecular level the level of binding) will dissolve the cell walls of bacteria in order to achieve the purpose of sterilization, sterilization is a safe measure, it prevents the proliferation of microbial secondary pollution generated by the filter.
   (3) UV photoelectron air purification process. This approach differs from conventional electrostatic filter, which will make use of the photoelectric effect of ultraviolet irradiation on the metal film, generating electrons and negative ions in the air so that contamination of material flows and charged dust collecting electrode. Currently in a limited small space existing applications.
   (4) In addition to the particle size range of filter salt sea salt particles is 1-lO, the median particle size of approximately 3-4. Along the coast where the air salinity average of about 1 (general area below this value), under the effect of typhoons and other strong winds of up to 100. This situation is extremely unfavorable for microelectronics factory. There are two measures: 1) filter used even after a lot of salt is not easy to adhere to precipitate; 2) air box into the water segment of the first set and weir plate segment may be collecting 90% of sea salt particles , then by conventional air filter trapped particles is not clear. Water spray should be directly discharged, will not be collected. Microelectronics factory setting for the sea to be considered in the air purification device.
   (5) the intelligent air purification system ion developed in Europe in recent years, an intelligent purification system, such as the Swiss company's LK earth ion IONAIR intelligent air purification system, which uses high-voltage plasma generating unit of work from the principle of a stable release the positive and negative oxygen ions, Group charged oxygen ions react with the VOC materials, broken down into and, at the same time charged oxygen ions wrapped and kill bacteria, purify the air in order to achieve the purpose of removing the odor, in this process, will produce a small amount. To ensure the indoor air quality at its best, the system is equipped with intelligent control system, through the air duct on the wind speed, and humidity sensors and return air duct and the new duct air quality sensor and can detect data transmission ionized controller to control the intensity of the ion generating unit of work, indoor air quality, automatic control, but these data transmitter and the network can be remotely monitored
   (6) new air blowing drenched room. The traditional blowing drenched room after the body stops blowing leaching, small indoor dust laden air is likely to be brought into the workshop, the new and improved blow Lynn room, with rapid self-cleaning function When you stop blowing leaching stream can be partially converted to top vertical airflow, it will give a small amount of dust in indoor air decreases rapidly achieve self-cleaning effect.
   (7) ultra-thin self-purification devices. Japan Airtech company recently developed an ultra-thin self-purification, the thickness of only 70mm, made of barrier type, movable, the outlet area of 830x570mm, can be configured to various levels of filters and a variety of operating modes.

Second, clean technology in the field of research programs
    Clean technology as an experimental subject in its development process is also a lot of practice a variety of research methods, and made no small development and progress in all these years.
    The following will introduce several research areas in the clean use of research programs:
   (1) is an important principle of decoupling experiments theory, the principle of decoupling can otherwise often through more complex or "chaotic" physical phenomena into several simple set of physical phenomena, the experimenter can make clearer to see the essence of the phenomenon, so experiment or analysis process is greatly simplified, and ultimately get resolved, the principle of decoupling has become an important scientific experiment theory and practice.
    In theory China Academy of Building Research Fellow Xu Zhonglin first clean room in a traditional room full particles uniformly distributed in 1978 based on the theory of a variety of factors cleanroom dust concentration unevenly distributed through the analysis of the impact of the clean room dust the concentration distribution of decoupling, the decoupling became three distribution areas (Jisong outlet beneath the mainstream area, back to the return air outlet zone area, the rest of the region as a zone of turbulence.
The traditional mechanism of clean space pollution control, mainly through the air disposed in the end of the high efficiency filter into the clean air. Since the filter is difficult to avoid in the production, transportation and installation process, always have the opportunity to continue to cause leakage of the filter medium, filter and installation of the junction surface, high efficiency filter leakage is inevitable, it alone seal plugging can not effectively solve the problem of leakage. Unidirectional flow clean room littered with high efficiency filter air filter ceiling not only played a role, but also play a role in both the flow and leak-proof effect, so the end of the high efficiency filter leak-proof, filtered air flow and distribution of three coupling effect in one, greatly improves the end of the filter requirements. In this context, the use of resistance drain layer theory, the end of the high efficiency filter filter, three functions are decoupled flow and leak-proof, has become a new technical measures for the development of the clean room.
   (2) conditional, through computational fluid dynamics (CFD) combined with the distribution of particle trajectory simulation airflow organizations can better address the legitimate equipment layout and at the lowest flow rate, no longer involved in the vortex to avoid contamination , but the application of this method, there were still some difficulties, it is not easy to spread.
Third, clean room energy-saving technology solutions
    Cleanroom energy consumption is large, it is because you want to maintain a clean production environment required level of clean air, pressure, temperature, relative humidity requirements; pollution prevention of cross-contamination, clean room production should be excluded in accordance with the requirements of the production process required for the whole room or local exhaust devices dust, heat, organic solvents generated in the process, at the same time required to clean room into the appropriate or necessary fresh outdoor air; according to the different requirements of air cleanliness level required there must be a ventilation frequency / air volume. According to the survey LSI manufacturing facility clean room clean air-conditioning system and refrigerator power consumption accounts for about 50% of the total electricity consumption of the plant around. Figure 3 is a proportion of a company's American semiconductor chip factory in a variety of equipment power consumption.
As described above, energy consumption is a big clean room, clean room, if well-designed, carefully planned, save energy and reduce energy consumption are possible, energy-saving potential capacity is not small.
    For clean room, energy-saving air conditioning system running problem, you can have the following solutions:
   1, the process is arranged within the clean room flat
As far as possible small clean room, clean workstations, laminar flow hood, clean tunnel, micro-environment, etc., to reduce the high level of clean room area is to reduce energy consumption, energy saving possible measures. Foreign papers reported: compared with the traditional production environment clean plant investment microenvironment can save 40%; air transport costs alone can save 70%.
   2, during the construction plane, elevation design should strive to implement energy efficiency requirements
   Doors and windows clean room design is appropriate or not, it is to reduce the energy consumption of clean room construction important issue here is to control the first window to wall ratio, according to the characteristics of the clean room to minimize the window area on the outer wall; followed by the construction of windows and doors gas tightness requirements and material selection of high-quality and reliable, to ensure that the doors and windows insulation (cold) effect and reduce cold air infiltration, to prevent the "cold bridge" phenomenon.
   3, reduce heat cleanroom (cold) technology measures load
  (1) According to the production process requirements to determine the appropriate clean indoor air clean grade and temperature, relative humidity parameters, to meet the production process of the premise, from energy conservation point of view, according to different processes / different requirements of the room to determine the air clean grade, temperature, relative humidity parameters, a lower value may be low as possible.
   (2) in close collaboration with the production technology provider, to accurately determine the need to set up the room clean room ventilation means of the amount of exhaust or process or production equipment, which is due to the increased amount of clean room ventilation, which means the purification of fresh air supplement air conditioning system increases. In the access plant design sometimes occur due to the increased amount of exhaust purification of the air conditioning system so that fresh air is greater than a predetermined required amount of fresh air, so that the thermal design of (cold) load increases, therefore, to determine the exact amount of clean indoor air exhaust It is one of the important measures to reduce energy consumption.
   4, to reduce the amount of air purification systems and air conditioning systems technical measures to reduce resistance
   (1) according to production process requirements of different air cleanliness levels and different working hours, shifts rational division of air conditioning system. But when developing the program seriously consider reducing the length of the pipeline, reducing wind resistance tube technology necessary measures, so that not only reduces power consumption can not increase more construction costs.
   (2) the rational organization of air conditioning system in a variety of air filter settings for larger clean room clean air-conditioning systems of new wind centralized control of air volume size, etc.
   (3) air conditioning system should be designed to the rational use of return air. In the production process does not produce harmful or cross-contamination does not occur when the air conditioning system to ensure fresh air and keep the pressure value under the provisions of the clean room, in order to reduce energy consumption, should make full use of the return air. For a large number of ventilators unidirectional flow clean room, air-conditioned room when the one-way flow clean room far away from, you can use a portion of the air is not recycled directly back to the room, it can reduce energy consumption.
   5, reasonable to purify air-conditioning duct system design
Duct should be arranged to shorten the length of the duct, reducing unnecessary elbow set, attachments, simplified duct shape, efforts to reduce the resistance of the air duct system to reduce energy consumption.
   6, with variable air volume flow control, water
   (1) air volume control adjustment value based on the number of detected dust particles get clean room, or room pressure. Adopt technical measures, effective control of low air supply or production process does not work the room.
   (2) According to the characteristics of the production process, set the detection, control room ventilation device or equipment, or by the need to control the amount of exhaust ventilation or exhaust opening stop valve. Avoid still open when the room or equipment does not produce exhaust or exhaust valves, power consumption and unnecessary air supply.
   (3) fans, pumps and reasonable use of variable frequency unit, according to the air volume, the number of water supply, changing the fan, pump speed, lower power consumption.
   (4) air conditioning system air conditioning unit variable frequency control the amount of cold water, hot water or steam quantity.

IV Conclusion
    This article relates to the content of air cleaning technology in pollution control programs, research programs and energy-saving programs in three areas. Air cleaning technology development of China since the beginning of the 1960s, each now with considerable strength in some theoretical research and application has reached the international advanced level, but the start time of air cleaning technology and related technical specifications in time look, from the popularity of clean technology applications in the field of view, the overall level of development of clean technologies, the country with the world's industrially developed countries there are still many gaps. Our road visible clean technology development long way to go.